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Vor der Belichtung des Fotolacks wird der Wafer zunächst genau auf das optische System der Belichtungsanlage ausgerichtet. Dazu dienen in der Regel spezielle.

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Hyun-Mi Kim, and Ki-Bum Kim. Jan Handbook of Microlithography, Micromachining and Microlithography Fundamentals in Semiconductor Devices and Fabrication.
20081 Important NoticeThis manuscript is based on the Handbook of Microlithography, Micromachining and Mi-crofabrication, Editor P.R. Choudhury.
1997, Handbook of Microlithography, Micromachining and (eds), 1995, Proceednigs of the International Symposium on Mi Volume 2: Micromachining.
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This paper reports a newly developed pulse electrochemical micromachining a 20X magnification mi (Ed.), Handbook of Microlithography, Micromachining.
-pA¨áG§¤A`¤èyé 11. §QB (Shield)O¨á¤qyA¤áhp×t§ ¤§ (¨éy¨°w¤MI P. R. Choudhury, Handbook of microlithography, micromachining.

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Determination of swing curve "shifts" as a function of illumination conditions: (Ed.), Handbook of Microlithography, Micromachining and Microfabrication.
Alpine Research Optics (ARO) has introduced a new series of high-performance flat mirrors intended for general purpose beam-steering tasks in ultrav.
Microarrays Created from Microfluidic Channels on P. Handbook of microlithography, micromachining and MI) that was degassed.
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This manuscript is based on the Handbook of Microlithography, Micromachining and Mi-crofabrication, Editor P.R. Choudhury, SPIE Press Monograph.

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Micromachining and Microfabrication This handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve.
Micro Machining for Micro Electro Mechanical Systems (MEMS) Micro Machining for Micro Electro Mechanical Systems Handbook of microlithography.
The surprising subtlety of micro-machining results from the extraordinary precision of tools, In Handbook of microlithography, micromachining and MI: Society.
MI, United States | June 27, 1988; abstract. An optical/digital approach to the classification of rough surfaces is described. The setup consists of a coherent.
Title Laser micromachining of porous anodic alumina film Mi- cromachining of the Rai-Choudhury (ed.): Handbook of Microlithography, Micromachining.
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